Method for making narrow top poles for inductive magnetic heads
AssigneeSeagate Technology LLC
InventorsSteven A. Mastain, Wallace A. Peck, Diana M. Simplair, Kurt A. Rothstein
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AssigneeSeagate Technology LLC
InventorsSteven A. Mastain, Wallace A. Peck, Diana M. Simplair, Kurt A. Rothstein
Estimating the term…
A method for forming a top magnetic pole of an inductive magnetic head being begins with the step of forming a photolithographic material over a layer of insulating material at a hill region and gap region of the inductive magnetic head formed on a wafer and over a waste region of the wafer. Second, a mask is patterned on the photolithographic material defining a paddle region over the hill region, a feeder region over the waste region, and a trench region between the feeder region and the paddle region. The trench region extends over the gap region. Third solvent is admitted into the feeder region to flow in a laminar flow through the trench region to the paddle region to form the mask and expose a surface of the layer of insulating material in the paddle and trench regions of the mask.
In a method of forming the top magnetic pole of an inductive magnetic head being formed on a wafer, the improvement comprising:
Dependencies are inferred from the claim text.