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US 6,379,466 B1Granted
Temperature controlled gas distribution plate
AssigneeApplied Materials, Inc.
InventorsTurgut Sahin, Salvador Umotoy, Avi Tepman, Ronald Lloyd Rose
Life of this patent
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Abstract
The temperature controlled gas distribution plate of the present invention includes a liquid cooling passage, with inlet and outlet ports, that is formed within the gas distribution plate. In the preferred embodiment, the plate is formed with an upper passage cover and a lower base having a liquid passage channel formed within the side walls thereof. The cover and base are welded together to form a sealed liquid passage within the plate through which the liquid coolant flows.
Claims2
An apparatus, comprising:
- a chemical vapor deposition chamber;
- a gas injection cover member having a process gas inlet in communication with said chemical vapor deposition chamber and a coolant system configured to cool said process gas inlet;
- a gas distribution plate interconnected to said gas injection cover member and including:
- a plate member having at least one gas distribution hole therethrough configured to permit process gas to pass therethrough, said plate member formed from a base part and a cover plate part;
- a liquid coolant passage being formed as a channel disposed in said base part to permit the movement of a coolant liquid therethrough, and said cover plate part being fixedly engaged to said base part to form a sealed cover to said channel, whereby said liquid coolant passage is formed within said plate member;
- a liquid inlet being engaged to said plate member and communicating with said liquid coolant passage;
- and
- a liquid outlet being engaged to said plate member and communicating with said liquid coolant passage.
5 more elements
Dependencies are inferred from the claim text.