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US 6,378,989 B1Granted
Micromechanical device with ribbed bend actuator
AssigneeSilverbrook Research Pty Ltd
InventorKia Silverbrook
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Abstract
A method of forming a moveable micromechanical device including a bend actuator includes forming a substrate comprising a series of structures formed in a plurality of deposited lower layers, the substrate having a predetermined upper surface profile planarizing the upper surface to achieve a substantially flat surface, and forming a bend actuator on the upper surface of the substrate so as to bend in a direction away from and towards the substrate.
Claims9
A method of forming a moveable micromechanical device including a bend actuator, said method comprising the steps of:
- forming a substrate comprising a series of structures formed in a plurality of deposited lower layers, said substrate having a predetermined upper surface profile;
- planarizing said upper surface to achieve a substantially flat surface;
- and
- forming said bend actuator on said upper surface of said substrate so as to bend in a direction away from and towards the substrate.
1 more element
Dependencies are inferred from the claim text.