Arrangement for spectral interferometric optical tomography and surface profile measurement

Abstract

An arrangement is provided for optical surface profile measurement and for obtaining optical sectional images of transparent, partially transparent and opaque objects by the spectral interferometric OCT method. In the spectral interferometric OCT method, the depth position of the object locations from which light is diffusely reflected is given by the light diffusely reflected by the object through a Fourier transform. Because of the path difference between the object light and reference light which is required for this purpose, large spatial frequencies occur in the spectrum which impair the resolution capacity of this method. According to the invention, the reference light is used to measure the phase of the wavelength spectrum by use of discrete phase displacements from the measured spectral intensities. This is also possible when the path difference between the object light and reference light is zero and a worsening of resolution therefore does not occur in this case.

Dependencies are inferred from the claim text.