Replicating a nanoscale pattern
AssigneeCorning Incorporated
InventorsNick J. Visovsky, David D. Wang
Life of this patent
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Abstract
A method of replicating a nanoscale pattern which comprises forming the pattern on the outer surface of a cylindrical roller, providing a surface upon which the pattern is to be replicated, and transferring the nanoscale pattern from the cylindrical roller onto the surface to provide at least one replication of the pattern on that surface. The roller is adapted to carry the pattern on its outer surface and transfer the pattern to a substrate. The ultimate product may be a grating polarizer.
Claims12
A method of producing a metal nanoscale pattern on a glass substrate which comprises:
- providing a patterned nanoscale mold;
- providing a cylindrical roller having a deformable coating on the surface thereof;
- using the patterned mold to form the pattern in the deformable coating on the outer surface of the cylindrical roller, thereby producing a patterned coating;
- providing a glass substrate upon which the pattern is to be replicated;
- transferring the patterned coating from the cylindrical roller onto the glass substrate;
- and
- using the patterned coating transferred from the cylindrical roller to the glass substrate to create a corresponding metal pattern on the glass substrate.
A method of producing a metal nanoscale pattern on a glass substrate which comprises:
- providing a patterned nanoscale mold having a patterned surface;
- applying a first deformable coating over the patterned surface of the nanoscale mold to form a patterned layer;
- providing a cylindrical roller having an outer surface;
- rotating the cylindrical roller across the patterned layer to transfer the patterned layer from the nanoscale mold to the outer surface of the cylindrical roller, thereby forming a patterned cylindrical roller;
- providing a glass substrate having a second deformable coating deposited thereon;
- using the patterned cylindrical roller to form a pattern in the second deformable coating, thereby producing a glass substrate having a patterned coating thereon and;
- using the glass substrate having a patterned coating, thereon to create a corresponding metal pattern on the glass substrate.
A method of producing a metal nanoscale pattern on a glass substrate which method comprises:
- providing a cylindrical roller having a nanoscale pattern on the surface thereof, the nanoscale pattern comprising tips;
- providing a substrate surface having a deformable coating thereon;
- rotating the cylindrical roller over the deformable coating to transfer the deformable coating to the tips of the cylindrical roller's nanoscale pattern;
- providing a glass substrate;
- transferring the deformable coating from the tips of the cylindrical roller's nanoscale pattern to the glass substrate, thereby producing a glass substrate having a patterned coating thereon;
- and
- using the glass substrate having a patterned coating thereon to create a corresponding metal pattern on the glass substrate.
A method of producing a metal nanoscale pattern on a glass substrate which method comprises:
- providing a cylindrical roller having a nanoscale pattern on the surface thereof, the nanoscale pattern comprising tips;
- applying a soluble organic material over the tips of the cylindrical roller's nanoscale pattern;
- providing a glass substrate having a metal film deposited thereon;
- transferring the soluble organic material from the tips of the cylindrical roller's nanoscale pattern to the metal film to form a pattern of protected metal elements;
- removing unprotected metal intermediate the protected metal elements;
- and
- removing the soluble organic coating to leave a metal nanoscale pattern on the glass substrate.
Dependencies are inferred from the claim text.