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AssigneeCanon Kabushiki Kaisha
InventorsMasami Ikeda, Hiroshi Sugitani, Shigeyuki Matsumoto, Yasuhiro Naruse, Kenji Makino, Masaaki Izumida, Seiichi Tamura
Estimating the term…
A heat generating resistor comprised of a film composed of a TaN0.8-containing tantalum nitride material which is hardly deteriorated and is hardly varied in terms of the resistance value even upon continuous application of a relatively large quantity of an electric power thereto over a long period of time. A substrate for a liquid jet head comprising a support member and an electrothermal converting body disposed above said support member, said electrothermal converting body including a heat generating resistor layer capable of generating a thermal energy and electrodes being electrically connected to said heat generating resistor layer, said electrodes being capable of supplying an electric signal for demanding to generate said thermal energy to said heat generating resistor layer, characterized in that said heat generating resistor layer comprises a film composed of a TaN0.8-containing tantalum nitride material. A liquid jet head provided with said substrate for a liquid jet head. A liquid jet apparatus provided with said liquid jet head.
A substrate for a liquid jet head comprising a support member and an electrothermal converting body disposed above said support member, said electrothermal converting body including a heat generating resistor layer for generating thermal energy and electrodes being electrically connected to said heat generating resistor layer for supplying an electric signal to generate said thermal energy in said heat generating resistor layer, characterized in that said heat generating resistor layer comprises a film composed of a TaN0.8hex-containing tantalum nitride material, with hex being a hexagonal structure.
A substrate for a liquid jet head according to claim , wherein the TaN0.8hex-containing tantalum nitride material is selected from the group consisting of a tantalum nitride material substantially comprising TaN0.8hex, tantalum nitride materials containing TaN0.8hex in an amount of more than 17 mol. %, tantalum nitride materials containing TaN0.8hex, and Ta2N, and tantalum nitride materials containing TaN0.8hex and TaN.
A liquid jet head comprising a liquid discharging outlet;
A liquid jet apparatus comprising (a) a liquid jet head including a liquid discharging outlet;
Dependencies are inferred from the claim text.