Series and shunt mems RF switch

The method of performing electrical switching in a metallic conductor signal path of a radio frequency integrated circuit electrical device, said method comprising the steps of:

• interrupting a lengthwise extent of said signal path with a movable metallic conductor-inclusive electrical switching member having said movable metallic conductor selectably disposable by incorporated spring tension in one of an electrically open switching position and an electrically closed switching position;
• changing said switching member movable metallic conductor switching position with electrostatic force generated by an electrical potential switch control signal;
• limiting spring tension urged movable metallic conductor movement arc and switch element spacing gap of said movable metallic conductor electrical switching member with a metal stopping member selectively disposed along a switch position-changing swing path thereof;
• coupling radio frequency electrical signal between said movable metallic conductor-inclusive electrical switching member and a switch output conductor member using increased electrical capacitance coupling achieved between said members in said electrically closed switching position;
• limiting capacitance-accomplished electrical signal coupling between said movable metallic conductor electrical switching member and said switch output conductor member by grounding said movable metallic conductor electrical switching member to a grounded electrical potential metal stopping member in said switch electrically open position.

Integrated circuit electrical device metallic signal conductor path electrical switching apparatus comprising:

• a lengthwise extended metallic signal conductor extending across a semiconductor layer surface of said integrated circuit;
• an arcuate movable metallic conductor-inclusive electrical switching element located in said metallic signal conductor and in electrical series with opposed ends of said signal conductor;
• a fixed position electrical switch output element also located in said metallic signal conductor and disposed at an end portion thereof on said semiconductor layer surface;
• an end portion-removed section of said fixed position electrical switch output element being located within arcuate reach of said movable metallic conductor-inclusive electrical switching element;
• said movable metallic conductor electrical switching element being electively disposable in either of spring tension-urged, electrically open and electrically closed switching positions of smaller and larger capacitance coupling respectively between said movable metallic conductor electrical switching element and said fixed position electrical switch output element;
• electrostatic force generating electrical potential source means for moving said switching member movable metallic conductor arcuately from said electrically open switching position into said electrically closed switching position;
• metal stopping member means selectively disposed in an opening swing arcuate path of said switching member movable metallic conductor for limiting spring tension urged switch opening arcuate travel and open switch element spacing gap of said movable metallic conductor electrical switching member in said electrically open switching position;
• said metal stopping member means being disposed at zero signal electrical potential of said integrated circuit for shunt loading movable metallic conductor electrical switching element electrical signal to zero potential in said electrically open switching position. spring tension-urged.