Forming electrolyte for forming metal oxide coating film

A method for manufacturing a metal wiring, comprising:

• forming an oxide coating film on an aluminum wiring by anodic oxidation in a nonaqueous solution containing a salt of an inorganic oxoacid or a salt of an organic carboxylic acid;
• and
• heat treating said aluminum wiring at a temperature of from 300-450° C.;
• wherein said aluminum wiring contains a rare earth element in a range of 1% by weight to 8% by weight based on the weight of said aluminum wiring;
• and
• wherein said aluminum wiring has a specific resistance of 10 μΩ·cm or lower.

A method for manufacturing a metal wiring, comprising:

• forming an oxide coating film on an aluminum wiring by anodic oxidation in a nonaqueous solution containing a salt of an inorganic oxoacid or a salt of an organic carboxylic acid;
• and
• heat treating said aluminum wiring at a temperature of from 300-450° C.;
• wherein said aluminum wiring contains a rare earth element in a range of 1% by weight to 8% by weight based on the weight of said aluminum wiring;
• and
• wherein said aluminum wiring has a peak intensity ratio of Al (220) peak to Al (111) peak by X-ray diffraction using CuK α rays, Al (220)/Al (111), of 0.01 to 10000.

A method for manufacturing a metal wiring, comprising:

• forming an oxide coating film on an aluminum wiring by anodic oxidation in a nonaqueous solution containing a salt of an inorganic oxoacid or a salt of an organic carboxylic acid;
• and
• heat treating said aluminum wiring at a temperature of from 300-450° C.;
• wherein said aluminum wiring contains a rare earth element in a range of 1% by weight to 8% by weight based on the weight of said aluminum wiring;
• and
• wherein said aluminum wiring has an integration intensity ratio of Al (220) peak to Al (111) peak by X-ray diffraction using CuK α rays, Al (220)/ Al (111) of 0.01 to 10000.