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US 6,361,712 B1Granted
Composition for selective etching of oxides over metals
AssigneeArch Specialty Chemicals, Inc.
InventorsKenji Honda, Michelle Elderkin
Life of this patent
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Abstract
A composition for selective etching of oxides over a metal. The composition contains water, hydroxylammonium salt, carboxylic acid, a fluorine containing compound, and optionally, a base. The pH of the composition is about 2 to 6.
Claims12
A composition for selective etching of oxides over a metal comprising:
- (a) water;
- (b) hydroxylammonium salt in an amount about 0.1 wt. % to about 0.5 wt. % of said composition;
- (c) carboxylic acid selected from the group consisting of:
- formic acid, acetic acid, propionic acid, valeric acid, isovaleric acid, oxalic acid, malonic acid, succinic acid, glutaric acid, maleic acid, fimaric acid, phthalic acid, 1,2,3-benzenetricarboxylic acid, glycolic acid, lactic acid, citric acid, salicylic acid, tartaric acid, gluconic acid, and mixtures thereof;
- (d) a fluorine-containing compound;
- and
- (e) optionally, base.
4 more elements
A composition for selective etching of oxides over a metal substrate comprising:
- (a) water;
- (b) about 0.1 wt. % to 0.5 wt. % hydroxylammonium sulfate;
- (c) about 0.1 wt. % to 1.0 wt. % citric acid;
- and
- (d) about 0.01 wt. % to 0.5 wt. % hydrogen fluoride.
2 more elements
Dependencies are inferred from the claim text.