Method and apparatus for automatic routing for reentrant process
AssigneeAdvanced Micro Devices, Inc.
InventorsWilliam Jarrett Campbell, Anthony J. Toprac, Christopher A. Bone
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Abstract
The present invention provides for a method and an apparatus for automatic routing of semiconductor devices within a manufacturing area. Performance of a plurality of manufacturing tools is tracked while processing semiconductor devices. At least one optimal combination of the manufacturing tools is determined based upon the tracked performance of the manufacturing tools. A queuing system is implemented to attain the optimal combination of the manufacturing tools. A dispatch system is deployed in response to the queuing system for routing the semiconductor devices within the manufacturing area.
Claims31
A method for automatic routing of semiconductor devices within a manufacturing area, comprising:
- tracking performance of a plurality of manufacturing tools while processing semiconductor devices;
- determining at least one optimal combination of said manufacturing tools based upon said tracked performance of said manufacturing tools;
- implementing a queuing system to attain said optimal combination of said manufacturing tools;
- and
- deploying a dispatch system in response to said queuing system for routing said semiconductor devices within said manufacturing area.
An apparatus for automatic routing of semiconductor devices within a manufacturing area, comprising:
- means for tracking performance of a plurality of manufacturing tools while processing semiconductor devices;
- means for determining at least one optimal combination of said manufacturing tools based upon said tracked performance of said manufacturing tools;
- means for implementing a queuing system to attain said optimal combination of said manufacturing tools;
- and
- means for deploying a dispatch system in response to said queuing system for routing said semiconductor devices within said manufacturing area.
A computer readable program storage device encoded with instructions that, when executed by a computer, performs a method for automatic routing of semiconductor devices within a manufacturing area, comprising:
- tracking performance of a plurality of manufacturing tools while processing semiconductor devices;
- determining at least one optimal combination of said manufacturing tools based upon said tracked performance of said manufacturing tools;
- implementing a queuing system to attain said optimal combination of said manufacturing tools;
- and
- deploying a dispatch system in response to said queuing system for routing said semiconductor devices within said manufacturing area.
Dependencies are inferred from the claim text.