Resonator structure embedded in mechanical structure
AssigneeNokia Networks Oy
InventorsMarkku Koivisto, Olli Salmela, Hans Somerma, Kalle Jokio
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Abstract
An assembly for supporting a substrate of an integrated circuit and forming a cavity resonator with the substrate. The assembly includes a baseplate in which a cavity for the cavity resonator is integrally formed. A substrate is mounted over the cavity resonator in the baseplate and an excitation coupling extends into the cavity of the cavity resonator.
Claims30
An assembly for supporting a substrate of an integrated circuit so as to form a resonator cavity, comprising a baseplate having an upper surface onto which the substrate of the integrated circuit is mountable, a cavity being formed in said baseplate, the cavity having an open end in the upper surface of said baseplate, the substrate of the integrated circuit closing the open end of the cavity in said baseplate when the substrate is mounted on the upper surface of the baseplate so that the cavity is suitable for use as a cavity resonator, and a tuner arranged in said baseplate for adjusting a resonant frequency of said cavity resonator.
An assembly in combination with a substrate on which an integrated circuit is mountable, said assembly being arranged for supporting said substrate of the integrated circuit and forming a resonator cavity, said assembly comprising a baseplate having an upper surface onto which said substrate of the integrated circuit is mountable, a cavity being formed in said baseplate, the cavity having an open end in the upper surface of said baseplate, said substrate of the integrated circuit being mounted on said baseplate and closing the open end of the cavity in said baseplate and thereby forming a part of said cavity so that said cavity is suitable for use as a cavity resonator, wherein said substrate comprises of plurality of layers and a plurality of vias extending upward from a bottom of said substrate, each said plural vias having an upper end, a bottom end, and via walls and being arranged such that a bottom of each of said plural via walls is in communication with said side wall of said cavity, said plural vias thereby extending said cavity into said substrate such that said substrate comprises a part of said cavity.
An Assembly in combination with a substrate on which an integrated circuit is mountable, said assembly being arranged for supporting said substrate of the integrated circuit and forming a resonator cavity, said assembly comprising a baseplate having an upper surface onto which said substrate of the integrated circuit is mountable, a cavity being formed in said baseplate, the cavity having an open end in the upper surface of said baseplate, said substrate of the integrated circuit being mounted on said baseplate and closing the open end of the cavity in said baseplate and thereby forming a part of said cavity so that said cavity is suitable for use as a cavity resonator, said assembly further comprising a metal structure, wherein said baseplate is mounted on said metal structure and said cavity extends from said surface area through said baseplate and into said metal structure.
Dependencies are inferred from the claim text.