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US 6,353,219 B1Granted
Object inspection and/or modification system and method
OwnerVictor B. Kleyinventor
Life of this patent
Estimating the term…
Abstract
A SPM (scanning probe microscopy) system for modifying an object includes producing measurements indicative of modifications to be made to the object. In accordance with the measurements, one or more SPM probes are manipulated to effect the modifications.
Claims63
A method of inspecting and modifying an object using SPM technology, the method comprising the steps of:
- inspecting the object by making SPM measurements of the object with a first SPM probe;
- generating modification data from the SPM measurements that identifies a modification to be performed on the object's material;
- and
- in response to the modification data, performing the modification by adding material to the object's material or removing a portion of the object's material with SPM probe or with a second SPM probe,
- wherein the modification includes at least a structural modification of the object's material or a chemical modification of the object's material.
2 more elements
A system for inspecting and modifying an object using SPM technology, the system comprising:
- a set of SPM probes, including a probe used for inspecting which is configured to make one or more SPM measurements and a probe used for modifying which is configured to add material to the object's material or to remove a portion of the object's material, the probe used for inspecting and the probe used for modifying being the same probe or being separate probes;
- a first component configured to inspect the object by making SPM measurements of the object using the probe used for inspecting;
- a second component configured to generate modification data from the SPM measurements that identifies a modification to be performed on the object's material;
- and
- a third component configured to perform the modification by adding material to the object's material or remove a portion of the object's material using the probe used for modifying, in accordance with the modification data;
- wherein the modification includes at least a structural modification of the object's material or a chemical modification of the object's material.
3 more elements
A system for inspecting and modifying an object using SPM technology, the system comprising:
- a set of SPM probes, including a probe used for inspecting which is configured to make one or more SPM measurements and a probe used for modifying which is configured to add material to the object's material or to remove a portion of the object's material, the probe used for inspecting and the probe used for modifying being the same probe or being separate probes;
- means for inspecting the object to produce SPM measurements of the object using the probe used for inspecting;
- means for generating modification data from the SPM measurements which identify a modification to be performed on the object's material;
- and
- means for performing the modification by adding material to the object's material or to remove a portion of the object's material using the probe used for modifying, in accordance with the modification data;
- wherein the modification includes at least a structural modification of the object's material or a chemical modification of the object's material.
3 more elements
Dependencies are inferred from the claim text.