Laser machining device
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsToshiyuki Hokodate, Yasuhiko Iwai, Miki Kurosawa, Junichi Nishimae, Kentaro Tanaka
Life of this patent
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Abstract
In a laser machining apparatus comprising a deflector for changing a direction of a laser beam outputted from a laser oscillator, and a converging lens for refracting the laser beam introduced from the deflector and focusing the laser beam onto a work to be machined, a lens position adjusting unit is provided for changing a relative position between a plurality of lenses constituting the converging lens and the lens position adjusting unit change the relative positions of the lenses so as to cancel a change in refractance of the lenses due to a change in the temperature.
Claims33
A laser machining apparatus comprising:
- a deflector for changing the direction of a laser beam outputted from a laser oscillator;
- and
- a converging lens for refracting a laser beam introduced from the deflector and focusing the laser beam onto a work to be machined;
- wherein said converging lens comprises a plurality of lenses and has a lens position adjusting unit for changing a relative position of the plurality of lenses to cancel a change of a reflective index of the converging lens according to a change in the temperature so that the converging characteristics of the converging lens does not depend on a change in the temperature of the converging lens.
A laser machining apparatus comprising:
- a deflector for changing a direction of a laser beam outputted from a laser oscillator;
- and
- a converging lens for refracting a laser beam introduced from the deflector and focusing the laser beam onto a work to be machined;
- wherein said converging lens has, in addition to a group of convex lenses for converging a light beam, a concave lens for temperature compensation incorporated therein, a change of a reflective index of the group of convex lenses because of a change in the temperature is canceled by a change of a reflective index of the concave lens, and the converging characteristics of the converging lens does not depend on a change in the reflective index of the converging lens because of the change in the temperature.
A laser machining apparatus comprising:
- a deflector for changing a direction of a laser beam outputted from a laser oscillator;
- a converging lens for refracting a laser beam introduced from the deflector and focusing the laser beam onto a work to be machined;
- a temperature measuring unit for detecting the temperature of the converging lens;
- and
- a temperature display unit for displaying the temperature of the converging lens detected by the temperature measuring unit.
A laser machining apparatus comprising:
- a deflector for changing a direction of a laser beam outputted from a laser oscillator;
- a converging lens for refracting a laser beam introduced from the deflector and focusing the laser beam onto a work to be machined;
- a temperature measuring unit for detecting the temperature of the converging lens;
- and
- an alarming unit for generating an alarm when a change in the temperature of the converging lens exceeds a previously decided permissible value.
A laser machining apparatus comprising:
- a deflector for changing a direction of a laser beam outputted from a laser oscillator;
- a converging lens for refracting a laser beam introduced from the deflector and focusing the laser beam onto a work to be machined;
- a temperature measuring unit for detecting the temperature of the converging lens;
- and
- a heating unit for heating the converging lens so that the temperature of the converging lens detected by the temperature measuring unit is maintained at a specified constant value.
A laser machining apparatus comprising:
- a deflector for changing a direction of a laser-beam outputted from a laser oscillator;
- a converging lens for refracting a laser beam introduced from the deflector and focusing the laser beam onto a work to be machined;
- a temperature measuring unit for detecting the temperature of the converging lens;
- and
- a temperature control unit for cooling the converging lens so that the temperature of the converging lens detected by the temperature measuring unit is maintained at a specified constant value.
A laser machining apparatus comprising:
- a deflector for changing a direction of a laser beam outputted from a laser oscillator;
- a converging lens for refracting a laser beam introduced from the deflector and focusing the laser beam onto a work to be machined;
- and
- a heat-insulating unit for protecting the converging lens from temperature of ambient air.
A laser machining apparatus comprising:
- a deflector for changing a direction of a laser beam outputted from a laser oscillator;
- a converging lens for refracting a laser beam introduced from the deflector and focusing the laser beam onto a work to be machined;
- a temperature measuring unit for detecting the temperature of the converging lens;
- and
- a variable wavelength laser oscillator for variably setting a wavelength of an outputted laser beam according to the temperature of the converging lens detected by the temperature measuring unit so that the amount of change in the optical characteristics of the converging lens because of a change in the temperature of the converging lens is canceled.
A laser machining apparatus comprising:
- a deflector for changing a direction of a laser beam outputted from a laser oscillator;
- a converging lens for refracting a laser beam introduced from the deflector and focusing the laser beam onto a work to be machined;
- a temperature measuring unit for detecting the temperature of the converging lens;
- and
- a cancel mechanism for adjusting a distance between the converging lens and the deflector according to the temperature of the converging lens detected by the temperature measuring unit to cancel the amount of change in the optical characteristics of the converging lens because of a change in the temperature of the converging lens.
A laser machining apparatus comprising:
- a deflector for changing a direction of a laser beam outputted from a laser oscillator;
- a converging lens for refracting a laser beam introduced from the deflector and focusing the laser beam onto a work to be machined;
- a temperature measuring unit for detecting the temperature of the converging lens;
- and
- an adaptive optics for adjusting a divergence angle of a laser beam according to the temperature of the converging lens detected by the temperature measuring unit so that the amount of change in the focal length of the converging lens because of a change in the temperature of the converging lens is canceled.
A laser machining apparatus comprising:
- a deflector for changing a direction of a laser beam outputted from a laser oscillator;
- a converging lens for refracting a laser beam introduced from the deflector and focusing the laser beam onto a work to be machined;
- a temperature measuring unit for detecting the temperature of the converging lens;
- and
- a collimate lens position adjusting mechanism for adjusting a position of a collimate lens according to the temperature of the converging lens detected by the temperature measuring unit so that the amount of change in the focal length of the converging lens because of a change in the temperature of the converging lens is canceled.
A laser machining apparatus comprising:
- a deflector for changing a direction of a laser beam outputted from a laser oscillator;
- a converging lens for refracting a laser beam introduced from the deflector and focusing the laser beam onto a work to be machined;
- a temperature measuring unit for detecting the temperature of the converging lens;
- and
- a machining table height adjusting mechanism for adjusting a distance between the converging lens and the work so that the amount of change in the focal length of the converging lens because of a change in the temperature of the converging lens is cancelled.
A laser machining apparatus comprising:
- a deflector for changing a direction of a laser beam outputted from a laser oscillator;
- a converging lens for refracting a laser beam introduced from the deflector and focusing the laser beam onto a work to be machined;
- a temperature measuring unit for detecting the temperature of the converging lens;
- and
- a temperature adjusting unit for adjusting the temperature of ambient air in a section where the converging lens is provided therein so that temperature of the converging lens detected by the temperature measuring unit is maintained at a specified contact value.
A laser machining apparatus comprising:
- a deflector for changing a direction of a laser beam outputted from a laser oscillator;
- a converging lens for refracting a laser beam introduced from the deflector and focusing the laser beam onto a work to be machined;
- and
- a cancel mechanism for canceling a change rate of the optical characteristics of the converging lens because of a change in the temperature of the converging lens by adjusting an angle of the laser beam introduced into the converging lens.
A laser machining apparatus comprising:
- a deflector for changing a direction of a laser beam outputted from a laser oscillator;
- a converging lens for refracting a laser beam introduced from the deflector and focusing the laser beam onto a work to be machined;
- a temperature measuring unit for detecting the temperature of the converging lens;
- and
- a machining table driving instruction correcting unit for correcting a positional instruction for the work to the converging lens according to the temperature of the converging lens detected by the temperature measuring unit and also for canceling fluctuation of the optical characteristics of the converging lens due to fluctuation in temperature of the converging lens.
Dependencies are inferred from the claim text.