Micro relief element and preparation thereof
AssigneeEpigem Limited
InventorsPhilip Summersgill, Thomas Grierson Harvey, George Timothy Ryan, Neil Carter
Life of this patent
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Abstract
A micro relief element which comprises a) a first layer of a first substrate, the first layer having a receptive surface capable of retaining a relief forming polymer; b) an overlay of a desired thickness of the relief forming polymer over the receptive surface; and c) at least one relief feature formed from the relief forming polymer and which protrudes above the overlay; structures and elements comprising such micro relief element; micro-optical, micro-fluidic, micro-electrical and micro-chemical applications thereof; and a method and apparatus for the preparation thereof.
Claims10
A composite micro relief element for use in micro-optical, micro-fluidic, micro-electrical, micro mechanical or micro-chemical applications which comprises
- (a) a first layer of a first substrate, the first layer having a receptive surface;
- and
- (b) a layer of a relief forming polymer which is retained on the receptive surface of the first layer, wherein the layer of relief forming polymer comprises overlay and at least one relief feature portions;
- wherein the overlay is affixed to the receptive surface, serves to planarise the receptive surface, and has a thickness variation less than +/−0.75 μm;
- and wherein the least one relief feature protrudes above the overlay.
Dependencies are inferred from the claim text.