US 6,348,808 B1Granted

Mobile ionic contamination detection in manufacture of semiconductor devices

AssigneeLSI Logic Corporation

InventorJames Yakura

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Abstract

A test transistor structure formed in a semiconductor device has a thick-oxide transistor with an elongated serpentine-shaped metal gate. The gate is used to first measure the threshold voltage of the thick-oxide test structure. Then, a current is passed through the elongated metal line which forms the serpentine gate to heat the area of the test structure. While being heated, a stress voltage is applied between the substrate and one end of the gate electrode, this stress voltage being much larger than the logic voltage used in operating thin-oxide transistors on the chip. After a selected time, the current is removed, the stress voltage is removed, and the threshold voltage of the thick-oxide transistor is again measured and compared to the original value. Any reduction in threshold voltage can be attributed to the migration of positive charge to the silicon-to-oxide interface beneath the gate, and is proportional to the area between the source and drain regions of the test transistor.

Claims4

Dependent claims

A test structure in a semiconductor substrate, the test structure for measuring a level of mobile ionic contamination, the test structure comprising:

a substrate contact pad for making electrical contact with the semiconductor substrate,
a source region formed in the semiconductor substrate, the source region having source region fingers,
a source region contact pad for making electrical contact to the source region,
a drain region formed in the semiconductor substrate, the drain region having drain region fingers, with the drain region fingers of the drain region interdigitated with the source region fingers of the source region,
a drain region contact pad for making electrical contact to the drain region, the source region contact pad and the drain region contact pad adapted for selectively applying a first voltage between the source region and the drain region,
a channel region formed in the semiconductor substrate, the channel region disposed in a serpentine configuration between the interdigitated source region fingers and the drain region fingers,
an insulation layer formed over the channel region between the source region and the drain region,
a gate electrode formed over the insulation layer, the gate electrode having a length sufficient to permit accurate resistance measurements of the gate electrode so as to determine a temperature of the gate electrode, the gate electrode having a serpentine shape so as to fit the length of the gate electrode within a compact area of the semiconductor substrate, and the gate electrode formed of a metal so as to heat across the entire length and width of the gate electrode when a current is applied through the gate electrode,
a first gate contact pad disposed at a first end of the gate electrode, and
a second gate contact pad disposed at a second end of the gate electrode,
at least one of the first gate contact pad and the second gate contact pad for selectively applying an increasing second voltage to the gate electrode and for measuring a threshold voltage when current starts to flow between the source region and the drain region,
the first gate contact pad and the second gate contact pad for selectively applying the current through the gate electrode and thereby heating the gate electrode, the insulation layer, and the channel region with a joule effect, with a thermal gradient between the gate electrode, the insulation layer, and the channel region, thereby drawing mobile ion contamination toward an interface between the channel region and the insulation layer,
the substrate contact pad for selectively applying a third voltage to the semiconductor substrate, where the thermal gradient and the third voltage reduce the threshold voltage, and the reduction in threshold voltage is proportional to the level of mobile ion contamination.

10 more elements

A method of measuring a level of mobile ionic contamination with a test structure in a semiconductor substrate the test structure having a substrate contact pad, a source region having source region fingers, a drain region having drain region fingers, with the drain region fingers of the drain region interdigitated with the source region fingers of the source region, a channel region disposed in a serpentine configuration between the interdigitated source region fingers and the drain region fingers, an insulation layer formed over the channel region between the source region and the drain region, an elongated serpentine metal gate electrode formed over the insulation layer, a first gate contact pad disposed at a first end of the gate electrode, and a second gate contact pad disposed at a second end of the gate electrode, the method comprising the steps of:

applying a first voltage between the source region and the drain region,
applying an increasing second voltage to the gate electrode,
detecting a first threshold voltage of the test structure at an initial temperature, where the first threshold voltage is the second voltage at which current begins to flow between the source region and the drain region,
applying a ground potential to the gate electrode,
applying a third voltage to the substrate contact pad, the drain region, and the source region, thereby drawing mobile ion contamination to an interface between the insulation layer and the channel region,
heating the channel region, insulation layer, and gate electrode to a stress temperature by passing a current through the gate electrode, thereby drawing mobile ion contamination to the interface between the insulation layer and the channel region,
removing the current passed through the gate electrode so that the test structure cools to the initial temperature,
removing the third voltage applied to the substrate contact pad, the drain region, and the source region,
applying an increasing fourth voltage to the gate electrode,
detecting a second threshold voltage of the test structure at the initial temperature, where the second threshold voltage is the fourth voltage at which current begins to flow between the source region and the drain region, and the second threshold voltage is less than the first threshold voltage due to the mobile ion contamination at the interface between the insulation layer and the channel region, and
determining the level of mobile ion contamination by comparing the first threshold voltage to the second threshold voltage.

8 more elements

Dependencies are inferred from the claim text.