Displaceable X/Y coordinate measurement table

An analytical instrument comprising:

• an optical system defining an optical path of the analytical instrument and directing light onto a sample;
• a measurement table disposed along the optical path;
• and
• a guiding system disposed along the optical path of the analytical instrument, the guiding system comprising:
• a mirror carrying arrangement having a first and a second surfaces and having a first and a second measurement mirrors mounted on the mirror carrying arrangement and disposed relative to each other at a predetermined angle;
• and
• a support system comprising a plurality of studs integrated into the measurement table, the upper ends of the plurality of the studs contacting a second plurality of support points, and a plurality of support members disposed on the first surface of the mirror carrying arrangement and forming a first plurality of support points suitable for supporting the sample in such a way that the sample does not contact the mirror carrying arrangement, the second plurality of support points supporting the mirror carrying arrangement above the measurement table in such a way that the measurement table does not contact the mirror carrying arrangement.

A displaceable coordinate measurement system comprising:

• a mirror body with two orthogonal mirrors attached to an outer side of the body;
• and
• a support system comprising a plurality of supporting members for supporting the mirror body above;
• a measurement table and for supporting a sample above the mirror body, wherein the mirror body, the measurement table and the sample constitute three separate pieces which do not contact each other in the assembled coordinate measurement system.