Low resistance magnetic tunnel junction device with bilayer or multilayer tunnel barrier
AssigneeInternational Business Machines Corporation
InventorsJeffrey R. Childress, Bruce A. Gurney, Markus Schwickert
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AssigneeInternational Business Machines Corporation
InventorsJeffrey R. Childress, Bruce A. Gurney, Markus Schwickert
Estimating the term…
A low resistance magnetic tunnel junction (MTJ) device has a bilayer or multilayer as the insulating tunnel barrier. In one embodiment the tunnel barrier is a bilayer of a first layer of magnesium oxide on the bottom magnetic electrode and an aluminum oxide layer on the magnesium oxide layer. This bilayer is formed by oxidizing a bilayer of Mg/Al. In a second embodiment the tunnel barrier is a bilayer of first layer of aluminum nitride and a second layer of aluminum oxide on top of the aluminum nitride first layer, with this bilayer formed by oxidizing a bilayer of AlN/Al. MTJ devices with trilayer barriers, such as AlN/Al2O3/AlN, MgO/Al2O3/MgO and Al2O3/MgO/Al2O3 are also possible. The resulting magnetic tunnel junction devices have resistance-area values less than 1000 Ω(μm)2 and preferably in the range of 0.1 to 100 Ω(μm)2, making the devices suitable for magnetic read sensors.
A magnetic tunnel junction device comprising:
A magnetic tunnel junction read sensor comprising:
Dependencies are inferred from the claim text.