Soft magnetic film soft magnetic multilayer film method of manufacturing the same and magnetic device
AssigneeMatsushita Electrical Industrial Co., Ltd.
InventorKumio Nago
Life of this patent
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Abstract
A soft magnetic film and a soft magnetic multilayer film of high saturation magnetization having an excellent soft magnetic property and a magnetic device use the same by providing an Fe—N thin film 2 formed on a substrate 1 with a configuration such that the main phases are α-Fe and γ′-Fe4N, the crystal grain sizes of the α-Fe phase and the γ′-Fe4N phase are reduced to as fine as not more than 10 nm, the spacings of the lattice plane (110) of α-Fe parallel to the film surface and the lattice plane (200) of γ′-Fe4N are expanded compared to those in the condition where there is no lattice strain, and the spacing of the lattice plane (111) of γ′-Fe4N is contracted compared to that in the condition where there is no lattice strain.
Claims37
A soft magnetic film containing Fe and N, wherein main phases in the film are α-Fe and γ′-Fe4N, mean grain diameters of the α-Fe phase and the γ′-Fe4N phase are not more than about 10 nm, spacings of a lattice plane (110) of the α-Fe phase parallel to a film surface and a lattice plane (200) of the γ′-Fe4N phase are expanded compared to a respective lattice plane spacing in a condition where there is no lattice strain, and a spacing of a lattice plane (111) of the γ′-Fe4N phase is contracted compared to a lattice plane spacing in a condition where there is no lattice strain.
A soft magnetic film having a double-layer structure in which a soft magnetic thin film is formed on a Si thin film, wherein said soft magnetic thin film contains Fe and N and in said soft magnetic thin film, main phases are α-Fe and γ′-Fe4N, mean grain diameters of the α-Fe phase and the γ′-Fe4N phase are not more than about 10 nm, spacings of a lattice plane (110) of the α-Fe phase parallel to a film surface and a lattice plane (200) of the γ′-Fe4N phase are expanded compared to a respective lattice plane spacing in a condition where there is no lattice strain, and a spacing of a lattice plane (111) of the γ′-Fe4N phase is contracted compared to a lattice plane spacing in a condition where there is no lattice strain.
A soft magnetic multilayer film comprising a soft magnetic film and a non-magnetic film being alternately laminated, wherein said soft magnetic film contains Fe and N, and in said soft magnetic film, main phases are α-Fe and γ′-Fe4N, mean grain diameters of the α-Fe phase and the γ′-Fe4N phase are not more than about 10 nm, spacings of a lattice plane (110) of the α-Fe phase parallel to a film surface and a lattice plane (200) of the γ′-Fe4N phase are expanded compared to a respective lattice plane spacing in a condition where there is no lattice strain, spacing of a lattice plane (111) of the γ′-Fe4N phase is contracted compared to a lattice plane spacing in a condition where there is no lattice strain.
A soft magnetic multilayer film comprising a soft magnetic film and a non-magnetic film being alternately laminated, wherein said soft magnetic film has a double-layer structure where a soft magnetic thin film is formed on a Si thin film, said soft magnetic thin film contains Fe and N and in said soft magnetic thin film, main phases are α-Fe and γ′-Fe4N, mean grain diameters of the α-Fe phase and the γ′-Fe4N phase are not more than about 10 nm, spacings of a lattice plane (110) of the α-Fe phase parallel to a film surface and a lattice plane (200) of the γ′-Fe4N phase are expanded compared to the respective lattice plane spacings in a condition where there is no lattice strain, and a spacing of a lattice plane (111) of the γ′-Fe4N phase is contracted compared to a lattice plane spacing in a condition where there is no lattice strain.
A magnetic device including a soft magnetic film in a magnetic core, wherein said soft magnetic film contains Fe and N, and in said soft magnetic film, main phases are α-Fe and γ′-Fe4N, mean grain diameters of the α-Fe phase and the γ′-Fe4N phase are not more than 10 nm, spacings of a lattice plane (110) of the α-Fe phase parallel to a film surface and a lattice plane (200) of the γ′-Fe4N phase are expanded compared to a respective lattice plane spacing in a condition where there is no lattice strain, and a spacing of a lattice plane (111) of the γ′-Fe4N phase is contracted compared to a lattice plane spacing in a condition where there is no lattice strain.
A magnetic device including a soft magnetic film in a magnetic core, wherein said soft magnetic film has a double-layer structure where a soft magnetic thin film is formed on a Si thin film, said soft magnetic thin film contains Fe and N, and in said soft magnetic thin film, main phases are α-Fe and γ′-Fe4N, mean grain diameters of the α-Fe phase and the γ′-Fe4N phase are not more than 10 nm, spacings of a lattice plane (110) of the α-Fe phase parallel to a film surface and a lattice plane (200) of the γ′-Fe4N phase are expanded compared to a respective lattice plane spacing in a condition where there is no lattice strain, and a spacing of a lattice plane (111) of the γ′-Fe4N phase is contracted compared to a lattice plane spacing in a condition where there is no lattice strain.
A magnetic device including a soft magnetic multilayer film in a magnetic core, wherein said soft magnetic multilayer film comprises a soft magnetic film and a non-magnetic film being alternately laminated, said soft magnetic film contains Fe and N, and in said soft magnetic film, main phases are α-Fe and γ′-Fe4N, mean grain diameters of the α-Fe phase and the γ′-Fe4N phase are not more than 10 nm, spacings of a lattice plane (110) of the α-Fe phase parallel to a film surface and a lattice plane (200) of the γ′-Fe4N phase are expanded compared to a respective lattice spacing in a condition where there is no lattice strain, and a spacing of a lattice plane (111) of the γ′-Fe4N phase is contracted compared to a lattice spacing in a condition where there is no lattice strain.
A magnetic device including a soft magnetic multilayer film in a magnetic core, wherein said soft magnetic multilayer film comprises a soft magnetic film and a non-magnetic film being alternately laminated, said soft magnetic film has a double-layer structure where a soft magnetic thin film is formed on a Si substrate, said soft magnetic thin film contains Fe and N, and in said soft magnetic thin film, main phases are α-Fe and γ′-Fe4N, mean grain diameters of the α-Fe phase and the γ′-Fe4N phase are not more than 10 nm, spacings of a lattice plane (110) of the α-Fe phase parallel to a film surface and a lattice plane (200) of the γ′-Fe4N phase are expanded compared to a respective lattice spacing in a condition where there is no lattice strain, and a spacing of a lattice plane (111) of the γ′-Fe4N phase is contracted compared to a lattice plane (111) spacing in a condition where there is no lattice strain.
Dependencies are inferred from the claim text.