Process for synthesizing one-dimensional nanosubstances by electron cyclotron resonance chemical vapor deposition
OwnerHan-Chang Shih, Shing-Li Sung +1inventors
InventorsHan-Chang Shih, Shing-Li Sung, Shang-Hua Tsai
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Abstract
The present invention provides a process for synthesizing one-dimensional nanosubstances. A membrane having channels serves as the host material for the synthesis. The anodic membrance is brought into contact with a microwave excited plasma of a precursor gas using an electron cyclotron resonance chemical vapor deposition (ECR-CVD) system. Parallel aligned nanosubstances can be synthesized in the channels of the membrane over a large area. Carbon nitride nanosubstances are synthesized successfully for the first time in the present invention.
Claims16
A process for synthesizing parallel-aligned one-dimensional nanosubstances, comprising contacting a membrane having a plurality of parallel aligned through channels with a microwave excited plasma of a precursor gas using an electron cyclotron resonance chemical vapor deposition (ECR-CVD) system under a microwave power of 400 to 1000 W, a pressure of 5×10−3 torr to 20×10−3 torr, a bias voltage of 0 to −500 V, and a temperature of 15° C. to 1000° C. to form the one-dimensional nanosubstances in the channels of the membrane by chemical vapor deposition of the precursor gas,
- wherein the channels of the membrane have a diameter of 30 nm to 350 nm.
Dependencies are inferred from the claim text.