Fluorescent X-ray analyzer

Abstract

A fluorescent X-ray analyzer includes a detector (6) for detecting fluorescent X-rays (5) emitted from a sample piece (1) to be analyzed, and a first collimator (10) disposed between the sample piece (1) and the detector (6) supported for movement between inserted and retracted positions with respect to a path of travel of the fluorescent X-rays (5) towards the detector (6). The first collimator (10) comprises a wall (11) adjacent the sample piece (1) that is stepped to provide stepped wall segments (11a, 11b, 11c) having respective apertures (12a, 12b, 12c) of varying diameters defined therein. The smaller the aperture, the closer it is to the sample piece (1) when one of the apertures (12a, 12b, 12c) is selected according to a size of a target area of the sample piece (1) to be measured and is then brought in register with the path of travel of the fluorescent X-rays (5) towards the detector (6).

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