Method of manufacturing a semiconductor device

Abstract

A method of manufacturing a semiconductor device includes storing and managing (i) data representing photomask specifications created in a semiconductor device design process and (ii) data for manufacturing process steps used in a semiconductor device manufacturing process, as integrated semiconductor device information integrated into a single database, the database registering (i) model data for each semiconductor device type and each process step and (ii) duplicate information for the semiconductor device design process and the semiconductor device manufacturing process; retrieving and displaying the integrated semiconductor device information and, based on the integrated semiconductor device information, creating or editing design data; retrieving and displaying the integrated semiconductor device information and, based on the integrated semiconductor device information, creating or editing manufacturing data; and manufacturing a semiconductor device based on the manufacturing data.

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