Method for controlling unit operating states of semiconductor fabricating equipment arranged in a processing line

Abstract

A method for controlling equipment in a semiconductor fabrication system includes automatically receiving operating data from equipment in a semiconductor fabrication system indicating operating conditions of units of the equipment. Reference data corresponding to the equipment are retrieved from a data base and indicate operating ranges for the respective units. It is then determined whether the operating conditions are within the operating ranges for the respective units. If the operating conditions are within the operating range for all the units, the method returns to automatically receiving operating state data. If the operating conditions are not within the operating range for a certain unit, in a variable ID a key value corresponding to the certain unit is changed indicating a change in the operating state. The operating state of the unit is then actually modified by inserting the variable ID into a equipment control message and downloading the equipment control message into the equipment. As a result, operation problems due to abnormally operating units in equipment are prevented without turning off the whole equipment, and productivity of the processing line is enhanced.

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