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US 6,335,522 B1Granted
Optical probe having a refractive index micro-lens and method of manufacturing the same
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Abstract
An optical probe which comprises a substrate, an elastic body supported by the substrate and having a free end, a projection having a micro-aperture and arranged at the free end of the elastic body, and a refractive index micro-lens also arranged at the free end of the elastic body and adapted to focus light to the micro-aperture.
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