Laser annealing apparatus

Abstract

The present invention relates to a laser annealing apparatus having a plurality of optical systems to generate a plurality of laser beams. A process time is reduced because a laser scanning operation on a large substrate is completed in a shorter time. The present invention includes a laser oscillator generating and supplying a laser, at least one beam splitter separating the laser from the laser oscillator into at least one or more laser beam, a plurality of optical systems processing a laser beam to produce laser having energy and profile sufficient to use directly for sample irradiation. The optical systems arrange each processed laser beam to a length direction.

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