Check-valved silicon diaphragm pump and method of fabricating the same

Abstract

A silicone rubber diaphragm pump utilizing a pair of MEMS Parylene check valves and a miniature solenoid plunger and actuator is comprised of a spacer sandwiched by a silicone rubber diaphragm on one side and a check valve support on the other. The check valves in the check valve support form the inlet and outlet to a pumping chamber defined between the check valve support and silicone rubber diaphragm. The pumping action has been demonstrated by driving the silicone diaphragm with the plunger using the solenoid type actuator to generate over and under pressures in the chamber. This forces the pumped medium into and out of the chamber, thus allowing the medium to be transported. Tubing or connectors affixed to the inlet and outlet ports of the check valve support structure allow for external fluidic access. The pump works with both gas and liquid.

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