Standard for calibrating and checking a surface inspection device and method for the production thereof
AssigneeWacker Siltronic Gesellschaft fur Halbleitermaterialien AG
InventorsRüdiger Schmolke, Dieter Gräf, Robert Kerschreiter, Hans-Adolf Gerber, Anton Luger, Monique Suhren
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Abstract
The invention relates to a reproducible standard for calibrating and checking the bright-field channel of a surface inspection device used for examining the flat surface of a sample and to a method for producing said standard whereby a microstructure is produced on a surface of a substrate provided as a standard, characterized in that the microstructure is smoothed out.
Claims5
Method for making a reproducible standard for calibrating and checking a bright field channel of a surface inspection device which is used for examination of a smooth surface of a specimen comprising the steps of
- producing a microstructure of objects on a surface of a substrate provided as a standard;
- and said objects having edges and having an appearance;
- and
- causing the microstructure to undergo a smoothing treatment;
- and by said smoothing treatment, said edges are removed and the objects are altered so that said appearance is modeled on that of defects to be found on the surface of the specimen.
Dependencies are inferred from the claim text.