Method for measuring radio-frequency current

Abstract

A radio-frequency power supply (1) and a matching box (2) are electrically connected with a coaxial cable (4) while the matching box (2) and a main unit (3) are electrically connected with a coaxial cable (5). Around the coaxial cable (5), a radio-frequency current transformer (6) is provided and an output signal from the radio-frequency current transformer (6) is given to an oscilloscope (7). In an apparatus using the radio-frequency power supply, with this constitution, a method for measuring a radio-frequency current can be provided, by which spurious components and frequency variation of the radio-frequency current can be measured simply and precisely at a low cost, without changing a series of communication paths, such as the coaxial cable, for the radio-frequency current.

Dependencies are inferred from the claim text.