Method of inspecting a substrate furnished with a phosphor layer
AssigneeU.S. Philips Corporation
InventorsFrederik C. Gehring, Lambertus J. J. Van Rijsewijk, Pieter Scholten, Petrus J. Uitterhoeve
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Abstract
A property of a layer of a phosphor screen on a substrate is determined by sending a beam of infrared radiation through the substrate and the layer and measuring, after the passage, the intensity of the beam. The radiation can be measured by a CCD camera.
Claims8
A method of determining a property of a of a mono-layer phosphor screen on a substrate, wherein the substrate and the layer are exposed to a beam of infrared radiation and, after passage through the mono-layer phosphor-screen and the substrate, a measurement of intensity of the beam is carried out.
A device for determining a property of a mono-layer phosphor screen on a substrate, wherein the device comprises a means for holding the substrate, and infrared source for emitting infrared radiation and a recording means for recording or measuring infrared radiation emitted by the source and passed by the substrate and the mono-layer phosphor screen.
Dependencies are inferred from the claim text.