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US 6,333,497 B2Granted
Probe with tip having micro aperture for detecting or irradiating light, near-field optical microscope, recording/reproduction apparatus, and exposure apparatus using the probe, and method of manufacturing the probe
AssigneeCanon Kabushiki Kaisha
InventorsYasuhiro Shimada, Ryo Kuroda
Life of this patent
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Abstract
A probe for detecting or irradiating light includes a displaceable support member on a substrate, a tip formed on the support member, and a bonding layer for bonding the tip onto the support member. The tip has a micro aperture. When a light-shielding layer is further formed on a surface of the tip, the micro aperture is formed on the light-shielding layer. The tip consists of a light transmission material.
Claims7
A method of manufacturing a probe for detecting or irradiating light, comprising the steps of:
- forming a recess portion on a surface of a first substrate;
- forming a peeling layer on said first substrate including said recess portion;
- forming a tip consisting of a light transmission material on said peeling layer including said recess portion;
- forming a bonding layer on a second substrate;
- bonding and transferring said tip onto said bonding layer;
- and
- forming a support member for supporting said tip by removing a portion of said second substrate.
4 more elements
Dependencies are inferred from the claim text.