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US 6,333,436 B1Granted
Styrene derivatives
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsMatsuo Nakashima, Jun Hatakeyama, Jun Watanabe, Yuji Harada
Life of this patent
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Abstract
Styrene derivatives of formula (1) are novel wherein R1 is H, F, C1-20 alkyl or fluorinated C1-20 alkyl, R2 in cis or trans conformation is F, C1-20 alkyl or fluorinated C1-20 alkyl, R3 is a phenol protecting group, p, q and r are integers in the range of 0≦p<5, 0≦q<5, 0<r<5, and 0≦p+q<5. Polymers obtained by polymerizing the styrene derivatives are useful as the base polymer of resist compositions.
Claims19
A styrene derivative of the following general formula (1):
- wherein the wavy line indicates cis or trans conformation, R1 is hydrogen, fluorine, an unsubstituted or fluoro-substituted, straight, branched or cyclic alkyl group of 1 to 20 carbon atoms, R2 is fluorine or an unsubstituted or fluoro-substituted, straight, branched or cyclic alkyl group of 1 to 20 carbon atoms, R3 is a phenol protecting group, and p, q and r are integers in the range of 0≦p<5, 0≦q<5, 0<r<5, and 0<p+q<5.
A styrene derivative of the following formula (3):
- wherein:
- R3 is a phenol protecting group;
- R4 is hydrogen, fluorine, methyl or trifluoromethyl;
- and
- r and s are integers in the range of 0<r<5 and 0<s<5.
2 more elements
Dependencies are inferred from the claim text.