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US 6,333,067 B2Granted
Selective growth of ferromagnetic films
AssigneeInternational Business Machines Corporation
InventorsNestor A. Bojarczuk, Jr., Peter R. Duncombe, Supratik Guha, Arunava Gupta, Joseph M. Karasinski, Xinwei Li
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Abstract
A method of forming the device, includes selective area deposition of a ferromagnetic material on a substrate. The substrate surface is partially covered with material having a crystal structure having at least one symmetry relation with the crystal structure of the ferromagnetic material.
Claims23
A method of forming a magnetic device, comprising:
- selective area deposition of a ferromagnetic material on a substrate,
- said substrate surface partially covered with material having a crystal structure having at least one symmetry relation with the crystal structure of said ferromagnetic material.
A method of forming a magnetic device, comprising:
- selective area deposition of a ferromagnetic material on a substrate,
- wherein a portion of said substrate contains material that bears a symmetry relation with the ferromagnetic material, and
- wherein said substrate comprises an amorphous material upon which the ferromagnetic material does not grow and which does not share a symmetry relation with the ferromagnetic material.
A method of forming a magnetic device, comprising:
- coating a substrate with a ferromagnetic layer;
- depositing an insulating barrier layer on said ferromagnetic layer;
- subsequent to lithographic patterning of said insulating barrier layer, depositing a SiO2 layer;
- opening contact holes in said SiO2 layer to said insulating barrier layer;
- selectively growing a ferromagnetic layer in the contact holes;
- and
- depositing a metallization layer on the selectively grown ferromagnetic layer.
4 more elements
A method of forming a film, comprising:
- coating a single crystal substrate with a SiO2 layer, said single crystal substrate comprising one of a TiO2 substrate and a sapphire substrate;
- forming a window in the SiO2 layer;
- and
- selectively growing ferromagnetic material in said window.
1 more element
Dependencies are inferred from the claim text.