Process for the production of an organic electroluminescent device
AssigneeTDK Corporation
InventorsMichio Arai, Kenji Nakaya
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Abstract
An apparatus and a process for the production of an organic EL device, which permits a high freedom of apparatus designing, permits effective processing and gives an organic EL device having a high light emission efficiency and excellent device characteristics, the apparatus comprising means of cleaning a surface of a substrate on which at least a hole-injecting electrode is formed, and means of forming an organic layer on the cleaned surface of the substrate, the cleaning means being for performing the cleaning with ozone gas generated with the ozonizer.
Claims17
A process for the production of an organic electroluminescent device, comprising
- forming a hole-injecting electrode on a substrate,
- cleaning the substrate on which the hole-injecting electrode is formed, with ozone generated in the range of 1 to 30 g/h with feed gases of O2 at a flow rate of no more than 3 Nl/min and N2 at a flow rate of no more than 30 Ncc/min using an ozonizer under a reduced pressure of 1.33×104 Pa or less, and
- forming an organic layer on said electrode.
A process for the production of an organic electroluminescent device, comprising
- forming a hole-injecting electrode on a substrate in a first chamber,
- cleaning the substrate on which the hole-injecting electrode is formed, with ozone generated with feed gases of O2 at a flow rate of no more than 3 Nl/min and N2 at a flow rate of no more than 30 Ncc/min using an ozonizer in the first chamber, and
- forming an organic layer on said electrode.
Dependencies are inferred from the claim text.