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US 6,332,928 B2Granted
High throughput OMPVE apparatus
AssigneeCornell Research Foundation, Inc.
InventorsJ. Richard Shealy, Barry P. Butterfield
Life of this patent
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Abstract
A cold wall reactor having inner and outer walls defining an annular reactor cell. A susceptor is rotatably mounted in the cell, and received wafers to be treated by gases flowing axially through the cell. The outer wall of the reactor is normally cooled, but is heated by a suitable furnace to provide a hot wall reactor when cleaning of the cell is required.
Claims17
A high throughput reactor, comprising:
- a generally cylindrical outer reactor wall having a top end and a bottom end;
- a top end cap closing the top end of said outer wall, and a bottom end cap closing said outer wall;
- an inner wall within, concentric to, and spaced from said outer wall, the inner wall having an interior chamber, and the space between said inner and outer walls forming an annular axially extending flow-through reactor chamber,
- the inner wall having a closed top end and having a bottom end opening through said bottom end cap;
- a rotation fixture within said reactor chamber and resting on a support bearing carried by said bottom end cap;
- a susceptor positionable on said rotation fixture for receiving material to be treated in said reactor chamber;
- a driver for rotating said rotation fixture around said inner wall and within said reactor chamber to carry said susceptor around said inner wall within said reactor chamber;
- and
- a heater within said inner wall for heating said material.
6 more elements
Dependencies are inferred from the claim text.