Evacuation system

An evacuation system comprising:

• a processing chamber;
• a vacuum pump;
• and
• an evacuation conduit communicating said processing chamber and said vacuum pump to evacuate said processing chamber, said evacuation conduit being provided with a first trapping device and a second trapping device arranged in series in a direction from said processing chamber to said vacuum pump, said first trapping device operating at a higher temperature and said second trapping device operating at a lower temperature, both cooperating for capturing components contained in an exhaust gas discharged from said processing chamber,
• wherein at least one of said first trapping device and said second trapping device is cooled by vaporization heat of liquified gas
• wherein at least either of said first or second trapping device has an inlet port for admitting a regeneration gas and an outlet port for releasing a regenerated gas other than an entry port and an exit port connected to said evacuation conduit.