Polishing apparatus with transfer arm for moving polished object without drying it

A polishing unit for polishing an object to produce a polished object by means of a polishing agent containing potassium, a cleaning unit for cleaning the polished object, and a transfer arm for moving the polished object from said polishing unit into said cleaning unit, and isolating means for isolating an internal atmosphere of said polishing unit, said cleaning unit and said transfer arm from an external atmosphere, wherein:

• said polishing unit has means for supplying the polishing agent containing potassium;
• said cleaning unit has means for bringing hot pure water or steam of pure water heated to or above 80° C. into contact with the polished object;
• and
• said transfer arm is operable to move the polished object without drying the polished object.