Method and apparatus for grinding a workpiece

An apparatus for grinding a workpiece, comprising:

• a workpiece holding unit holding the workpiece formed of a circular thin plate and rotating the workpiece about a center axis thereof;
• a grinding unit having a disk-shaped rotating grinding wheel, said grinding unit grinding an edge portion of the workpiece by performing a relative feeding movement between said rotating grinding wheel and the workpiece such that said rotating grinding wheel moves along at least one part of the edge portion of the workpiece in a thickness direction thereof, while rotating said grinding stone about an axis thereof disposed substantially parallel to a plane of the workpiece;
• and
• said workpiece holding unit includes:
• a pad holding the workpiece;
• a rotating shaft attaching said pad at one end thereof;
• and
• a cylindrical member rotatably supporting said rotating shaft.

An apparatus for grinding a workpiece, comprising:

• a workpiece holding unit holding the workpiece formed of a circular thin plate and rotating the workpiece about a center axis thereof;
• a grinding unit having a disk-shaped rotating grinding wheel, said grinding unit grinding an edge portion of the workpiece by performing a relative feeding movement between said rotating grinding wheel and the workpiece such that said rotating grinding wheel moves along at least one part of the edge portion of the workpiece in a thickness direction thereof, while rotating said grinding stone about an axis thereof disposed substantially parallel to a plane of the workpiece;
• a moving mechanism performing the relative movement between said rotating grinding wheel and the workpiece;
• and
• a guide mechanism guiding the relative movement of said moving mechanism, said guide mechanism including a hydrostatic bearing;
• wherein said moving mechanism comprises:
• a first moving mechanism performing a first relative linear movement between the workpiece and said rotating grinding wheel;
• and
• a second moving mechanism performing a second relative linear movement between the workpiece and said rotating grinding wheel perpendicular to said first relative linear movement;
• and
• wherein said workpiece holding unit includes said first moving mechanism, and said grinding unit includes said second moving mechanism, and
• wherein said workpiece holding unit includes:
• a pad holding the workpiece;
• a rotating shaft attaching said pad at one end thereof;
• a cylindrical m ember rotatably supporting said rotating shaft;
• and
• said hydrostatic bearings disposed between said rotating shaft and said cylindrical member.

An apparatus for grinding a workpiece, comprising:

• a workpiece holding unit holding the workpiece formed of a circular thin plate and rotating the workpiece about a center axis thereof;
• a grinding unit having a disk-shaped rotating grinding wheel, said grinding unit grinding an edge portion of the workpiece by performing a relative feeding movement between said rotating grinding wheel and the workpiece such that said rotating grinding wheel moves along at least one part of the edge portion of the workpiece in a thickness direction thereof, while rotating said grinding stone about an axis thereof disposed substantially parallel to a plane of the workpiece,
• wherein said grinding unit includes:
• a rough cutting unit having the rotating grinding wheel for cylindrical grinding, said rough cutting unit cutting the edge portion of the workpiece by performing a relative linear movement between the grinding wheel and the workpiece, while rotating the grinding wheel and the workpiece in the substantially same plane.