Transfer device centering method and substrate processing apparatus

A transfer device centering method for centering at least one holding member of a transfer device so that the transfer device transfers a substrate to a predetermined delivery position with the holding member in each of processing units in a substrate processing apparatus comprising at least one first processing unit for performing predetermined processing for the substrate mounted on a rotatable mounting table, at least one second processing unit which has a processing plate with a plurality of lift pins, moves the substrate between a mounting position and a transfer position by means of the lift pins, and performs predetermined processing for the substrate at the mounting position, and the transfer device for carrying the substrate into/out of the first and second processing units, comprising:

• a step of previously performing centering of positions at which the transfer device delivers the substrate in methods different from each other in the first and second processing units and storing these centering data in storage means;
• a step of previously ascertaining a relationship between the centering data in the first processing unit and the centering data in the second processing unit and storing the relationship in the storage means;
• a first correcting step of ascertaining a positional deviation amount of a position at which the transfer device delivers the substrate in either one of the first processing unit or the second processing unit and correcting the position at which the transfer device delivers the substrate based on the positional deviation amount;
• a replacing step of inputting correction data at his time to the storage means and based on this correction data and the relationship between the centering data in the first processing unit and the centering data in the second processing unit, replacing centering data for the other processing units previously stored in the storage means with predetermined correction data;
• and
• a second correcting step of correcting positions at which the transfer device delivers the substrate in the other processing units based on the correction data after replacement for the other processing units.

A substrate processing apparatus for performing predetermined processing for a substrate, comprising:

• a plurality of processing units each for performing predetermined processing for the substrate;
• a transfer device for transferring the substrate to a predetermined delivery position in each of the processing units;
• and
• centering means for obtaining correction data for correcting a position at which the transfer device delivers the substrate in each processing unit, and based on the correction data, correcting the position at which the transfer device delivers the substrate, and
• wherein said centering means comprising:
• storage means in which centering data for each processing unit are stored;
• and
• controlling means for ascertaining a positional deviation amount of a position at which the transfer device delivers the substrate in one unit, correcting the position at which the transfer device delivers the substrate based on the positional deviation amount, inputting correction data at this time to the storage means, based on this correction data, replacing the centering data for each processing unit already stored in the storage means with predetermined correction data, and based on the correction data after replacement, correcting positions at which the transfer device delivers the substrate in the other processing units.

A substrate processing apparatus for performing predetermined processing for a substrate, comprising:

• at least one first processing unit for performing predetermined processing for the substrate mounted on a rotatable mounting table;
• at least one second processing unit which has a processing plate with a plurality of lift pins, moves the substrate between a mounting position and a transfer position by means of the lift pins, and performs predetermined processing for the substrate at the mounting positions;
• a transfer device for transferring the substrate to/from a predetermined delivery position in each of the first and second processing units;
• and
• centering means for obtaining correction data for correcting a position at which the transfer device delivers the substrate in each of the processing units, and based on the correction data, correcting the position at which the transfer device delivers the substrate, and
• wherein said centering means comprising:
• storage means in which centering data when centering of positions at which the transfer device delivers the substrate is performed in methods different from each other in the first processing unit and the second processing unit and a relationship between the centering data in the first processing unit and the centering data in the second processing unit are stored;
• and
• controlling means for ascertaining a positional deviation amount of a position at which the transfer device delivers the substrate in either one of the first processing unit or the second processing unit, correcting the position at which the transfer device delivers the substrate based on the positional deviation amount, inputting correction data at this time to the storage means, based on this correction data the relationship between the centering data in the first processing unit and the centering data in the second processing unit stored in the storage means, replacing the centering data for each processing unit already stored in the storage means with predetermined correction data, and based on the correction data after replacement, correcting positions at which the transfer device delivers the substrate in the other processing units.