Substrate processing apparatus

A substrate processing apparatus, comprising:

• a first processing unit for processing a substrate;
• a second processing unit for processing the substrate;
• a cooling section for cooling outside air taken in from the outside to a predetermined temperature;
• a heat exchanger having a low temperature side flow path for letting the air cooled in said cooling section flow and a high temperature side flow path for letting outside air flow, and allowing heat exchange to be performed between the cooled air and the outside air;
• a warming and humidifying section for warming and humidifying the air flowing through the low temperature side flow path in said heat exchanger and warmed by the outside air flowing through the high temperature side flow path, and supplying the air with predetermined temperature and humidity to said first processing unit;
• and
• a warming section for warming the outside air flowing through the high temperature side flow path in said heat exchanger and cooled by the air flowing through the low temperature side flow path, and supplying the air with a predetermined temperature to said second processing unit.

A substrate processing apparatus, comprising:

• a first processing unit for processing a substrate;
• a second processing unit for processing the substrate;
• a cooling section for cooling air exhausted from said first processing unit to a predetermined temperature;
• a heat exchanger having a low temperature side flow path for letting the air cooled in said cooling section flow and a high temperature side flow path for letting air exhausted from said second processing unit flow, and allowing heat exchange to be performed between the cooled air and the air exhausted from said second processing unit;
• a warming and humidifying section for warming and humidifying the air flowing through the low temperature side flow path in said heat exchanger and warmed by the air exhausted from said second processing unit and flowing through the high temperature side flow path, and supplying the air with predetermined temperature and humidity to said first processing unit;
• and
• a warming section for warming the air exhausted from said second processing unit which is flowing through the high temperature side flow path in said heat exchanger and cooled by the air flowing through the low temperature side flow path, and supplying the air with a predetermined temperature to said second processing unit.

A substrate processing apparatus, comprising:

• a processing unit that performs predetermined processing for a substrate;
• a control unit that takes in outside air and controls the outside air taken in at a temperature lower than a preset air temperature in said processing unit and at a predetermined humidity;
• and
• a warming unit, provided in or near said processing unit, that warms the air, the temperature and humidity of which are controlled by said control unit, to a predetermined temperature and supplies the air with the predetermined temperature and the predetermined humidity into said processing unit;
• wherein said control unit includes:
• a cooler that cools the outside air taken in to a temperature not more than a dew-point temperature;
• a warmer that warms the cooled air to a temperature lower than the temperature of air to be supplied to said processing unit;
• and
• a humidifier that humidifies the warmed air to a predetermined humidity.

A substrate processing apparatus, comprising:

• a processing unit for performing predetermined processing for a substrate;
• a control unit for taking in outside air, temporarily cooling the outside air taken in, and thereafter controlling the outside air to a predetermined humidity;
• an air supply line, structured to allow air flowing through therein and outside air to perform heat exchange, for supplying the air of which the humidity is controlled by said control unit to said processing unit;
• and
• a warming unit, connected to said air supply line and provided in or near said processing unit, for warming the air of which the humidity is controlled by said control unit to a predetermined temperature and supplying it into said processing unit,
• said air supply line increasing the temperature of air to be supplied from said control unit to said warming unit by performing heat exchange between the air and outside air.

A substrate processing apparatus, comprising:

• a processing unit for performing predetermined processing for a substrate;
• a control unit for taking in outside air, temporarily cooling the outside air taken in, and thereafter controlling the outside air to a predetermined humidity;
• an outside air introducing line for introducing outside air into said control unit;
• an air supply line for supplying the air controlled by said control unit to said processing unit;
• and
• a warming unit, connected to said air supply line and provided in or near said processing unit, for warming the air of which the humidity is controlled by said control unit to a predetermined temperature and supplying it into said processing unit,
• said outside air introducing line and said air supply line being disposed so that at least parts of them allow heat exchange between them.