Ink jet recording head and method of manufacturing the same
AssigneeSeiko Epson Corporation
InventorsTomoaki Takahashi, Noriaki Okazawa, Ryoichi Tanaka
Life of this patent
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Abstract
An ink jet recording head of the type in which a passage unit is formed as a layer structure made up of a passage forming plate and an elastic plate. The elastic plate is formed with a thick portion and a thin film portion. The thick portion bonded to the common ink chamber is used as a beam structure deformable toward the common ink chamber. The beam structure is deformed to create a flexure in a thin film sealing the common ink chamber.
Claims21
An ink jet recording head comprising:
- a passage forming plate including a plurality of pressure chambers which communicate with respective nozzle orifices and which are arrayed with a partition wall disposed between adjacent two of said pressure chambers, and a common ink chamber which communicates with a plurality of ink supplying portions each communicating with at least one end of a corresponding one of said pressure chambers;
- an elastic plate bonded to said passage forming plate;
- and
- a pressure generating system provided for each of said pressure chamber, wherein
- said elastic plate is formed with a thick portion and a thin film portion,
- a part of said thick portion is constructed as a beam structure,
- a part of said thin film portion is flexible.
A method of manufacturing an ink jet recording head comprising:
- a passage forming plate including a plurality of pressure chambers which communicate with respective nozzle orifices and which are arrayed with a partition wall disposed between adjacent two of said pressure chambers, and a common ink chamber which communicates with a plurality of ink supplying portions each communicating with at least one end of a corresponding one of said pressure chambers;
- an elastic plate bonded to said passage forming plate;
- and a pressure generating system, provided for each of said pressure chamber, for varying pressure within a corresponding one of said pressure chambers, said method comprising:
- a laminating step of forming said elastic plate by laminating a high polymer film on a metal plate member;
- and
- a photo etching step, following said laminating process, of removing a portion of said metal plate member located correspondingly to at least said common ink chamber to provide a thin film portion formed of a high polymer film, while creating a long and narrow beam structure, which is deformable toward said common ink chamber, correspondingly to an outer edge portion of said common ink chamber using a thick portion formed of unremoved portion of said metal plate member and said high polymer film layered on said unremoved portion, wherein
- said beam structure is deformed using a contraction force of said high polymer film which is thermally contracted by a temperature variation in said photo etching process, to thereby deflect said thin film portion to be disposed correspondingly to said common ink chamber, and
- in this state said elastic plate is bonded to said passage forming plate.
A passage forming unit for an ink jet recording head, said unit comprising:
- a passage forming plate which at least partially defines a plurality of arrayed pressure chambers communicating with respective nozzle orifices, and which at least partially defines a common ink chamber communicating through ink supplying portions with said pressure chambers;
- an elastic plate fixed to said passage forming plate, said elastic plate having a side band portion, a beam structure portion and a thin film portion bounded at least by said side band portion and said beam structure portion, said thin film portion forming a deformable wall of said common ink chamber, said side band portion being located between said common ink chamber and said pressure chambers,
- wherein a rigidity of said beam structure portion is smaller than a rigidity of said side band portion.
Dependencies are inferred from the claim text.