Gas flow calibration of mass flow controllers

A system for gas flow calibration, comprising:

• a computer system;
• a mass flow meter (MFM) linked to the computer system;
• a plurality of mass flow controllers (MFCs) linked to the computer system, wherein the plurality of MFCs are connected in parallel to each other, and wherein the plurality of MFCs are connected in series to the MFM;
• a database, stored within the computer system, adapted for maintaining records comprising a plurality of calibrations, wherein each of the calibrations corresponds to one of the plurality of MFCs;
• and
• a program, adapted for execution on the computer system, to determine the calibration of a second MFC of the plurality of MFCs by:
• setting a first gas flow through a first MFC and the MFM at a first rate;
• recording a first reading from the MFM;
• setting a second gas flow through the second MFC and the MFM such that a second flow rate through the MFM results;
• recording a second reading from the MFM;
• comparing a difference of the second and first readings to the setting of the second MFC to determine a calibration of the second MFC;
• and
• modifying the calibration data depending on said comparing.