Electronic device having a thermally isolated element
AssigneeNEC Corporation
InventorAkio Tanaka
Life of this patent
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Abstract
An electronic device includes a thermally isolated element formed above a substrate such that the thermally isolated element is isolated from the substrate by a cavity, a thermal-to-electrical transducer for converting heat to an electrical signal, an electrical-to-thermal transducer for converting an electrical signal to heat, a functional material whose physical property changes at a particular temperature, and a circuit, formed on the substrate, for controlling the electrical-to-thermal transducer in accordance with a signal received from the thermal-to-electrical transducer. The thermal-to-electrical transducer, the electrical-to-thermal transducer, and the functional material are formed in the thermally isolated element.
Claims24
An electronic device, comprising:
- a substrate;
- a functional device which is operated at a desired temperature;
- a thermally isolated diaphragm formed above the substrate, said thermally isolated diaphragm including a device portion which is isolated from the substrate by a cavity;
- and
- a electrical-to-thermal transducer formed in said thermally isolated diaphragm for converting an electrical signal to heat;
- at least a part of the functional device being in thermal contact with the device portion of the thermally isolated diaphragm.
Dependencies are inferred from the claim text.