Margin inspector for IC wafers
AssigneeMosel Vitelic, Inc.
InventorsWen-Wang Tsai, Chun-Yan Wu
Life of this patent
Estimating the term…
Abstract
A margin inspector for IC wafers includes an upper plate and a supporting portion. The upper plate, which is formed as a transparent plate, has a plurality of concentric circular segments thereon for establishing a set of reference lines to examine the periphery ring of the wafer located under the upper plate while in examining operation. The supporting portion connected with the upper plate is used to form a working space, between the supporting portion and the upper plate, for accommodating the wafer to be examined. By applying these inspecting lines, any deviation on the washout periphery ring of the wafer can be easily and correctly located by eyesight.
Claims12
A margin inspector for IC wafers, comprising:
- an upper plate, formed as a transparent plate, having a plurality of concentric circular segments thereon for establishing a set of reference lines to examine a periphery ring of the wafer located under the upper plate while in examining operation;
- and
- a supporting portion, connected with the upper plate for supporting purpose, and forming a working space for examining the wafer therebetween with the upper plate and
- wherein said upper plate includes at least 3 spacers extruding from a bottom face of said upper plate;
- while in examining operation, said spacers contacting an edge of the wafer thereunder for avoiding direct contact of the upper plate and the wafer.
The margin inspector for IC wafers according to claim 6 wherein said supporting frame is connected perpendicular to said upper plate;
- while in examining operation, the wafer at a position having its edge thereof contacting with an inner surface of the supporting frame.
A margin inspector for IC wafers, comprising:
- an upper plate, formed as a transparent plate, having a plurality of concentric circular segments thereon for establishing a set of reference lines to examine a periphery ring of the wafer located under the upper plate while in examining operation;
- a base, separated from the upper plate and forming a working space therebetween with the upper plate for accommodating the wafer;
- and
- at least a supporting frame for fixedly connecting the base to the upper plate.
Dependencies are inferred from the claim text.