Process for producing a laminated ink-jet recording head
AssigneeSeiko Epson Corporation
InventorsMinoru Usui, Masato Shimada, Masami Murai, Kouji Sumi, Tsutomu Nishiwaki
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Abstract
A process for producing a laminated ink-jet recording head including the steps of forming a titanium layer across a surface of a diaphragm, and forming a layer of a piezoelectric material on the titanium layer by a hydrothermal method.
Claims11
A process for producing a laminated ink-jet recording head comprising a spacer in which a pressure generating chamber is formed, a diaphragm that closes one side of said pressure generating chamber and which has a piezoelectric vibrator of a flexural vibrating mode secured thereto, and a nozzle plate which closes a second side of said pressure generating chamber and which has a nozzle orifice bored for the issuance of ink drops, said process comprising the steps of
- forming a titanium layer across one surface of said diaphragm,
- forming a gold layer which is open in at least a region that corresponds to the pressure generating chamber,
- forming a layer of a piezoelectric material on said titanium layer by a hydrothermal method using said gold layer as a mask,
- removing said gold layer, and
- forming an electrode on said layer of a piezoelectric material after the removal of said gold layer.
Dependencies are inferred from the claim text.