Film or coating deposition and powder formation
AssigneeImperial College of Science, Technology and Medicine
InventorsKwang-Leong Choy, Wei Bai
Life of this patent
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Abstract
Methods for depositing a material onto a substrate include the steps of: feeding a material solution including one or more precursor compounds, a solvent and a pH-modifying catalyst to an outlet to provide a stream of droplets of the material solution; generating an electric field to electrostatically attract the droplets from the outlet towards the substrate; and providing an increase in temperature between the outlet and the substrate.
Claims34
A method of depositing a material onto a substrate, the method comprising the steps of:
- pressure feeding a material solution comprising one or more precursor compounds, a solvent and a pH-modifying catalyst from a material solution supply to an outlet;
- generating an electric field between the outlet and a substrate to provide a corona spray of droplets of the material solution and electrostatically guide the droplets from the outlet towards a surface of the substrate;
- and
- providing a decreasing temperature gradient from the surface of the substrate to the outlet, which temperature gradient is such that evaporation of the solvent from, and decomposition of, the droplets occurs as the droplets approach the surface of the substrate.
A method of depositing a material onto a substrate, the method comprising the steps of:
- feeding a material solution comprising one or more precursor compounds, a solvent and a pH-modifying catalyst to an outlet disposed opposite the substrate to provide a stream of droplets of the material solution;
- generating an electric field electrostatically to attract the droplets from the outlet towards the substrate;
- and
- providing a temperature gradient between the outlet and the substrate;
- wherein the feeding of the material solution, the electric field and the temperature gradient are configured such that the droplets one or both of decompose and react prior to reaching the substrate so as to form a powder.
A method of depositing a material onto a substrate, the method comprising the steps of:
- feeding a material solution comprising one or more precursor compounds, a solvent and a pH-modifying catalyst to an outlet to provide a stream of droplets of the material solution;
- generating an electric field electrostatically to attract the droplets from the outlet towards the substrate;
- providing a temperature gradient between the outlet and the substrate;
- cooling the material deposited on the substrate;
- and
- maintaining the electric field for at least a part of the time during which the deposited material is cooled.
A method of depositing a material onto a substrate, the method comprising the steps of:
- pressure feeding a material solution comprising one or more precursor compounds, a solvent and a pH-modifying catalyst from a material solution supply to an outlet;
- generating an electric field between the outlet and a substrate disposed opposite the outlet to provide a corona spray of droplets of the material solution and electrostatically guide the droplets from the outlet towards a surface of the substrate;
- and
- providing a decreasing temperature gradient from the surface of the substrate to the outlet, which temperature gradient is such that evaporation of the solvent from, and decomposition of, the droplets occurs as the droplets approach the substrate.
Dependencies are inferred from the claim text.