US 6,330,829 B1Granted

Oil-filled pressure transducer

AssigneeKulite Semiconductor Products, Inc.

InventorsAnthony D. Kurtz, Robert Gardner

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Abstract

A differential pressure transducer comprising: a housing having a first end containing a first recess, and an oppositely disposed second end containing a second recess; first and second isolation diaphragms respectively enclosing said first and second recesses and forming in conjunction therewith first and second cavities; first and second headers secured within said housing and being electronically coupled together; and, a pressure sensor being adapted to withstand an excess in either said first or second pressures and secured to said first header so as to isolate said first and second cavities from one another and being responsive to a first pressure applied to said first diaphragm and a second pressure applied to said second diaphragm to produce at least one signal indicative of a difference between said first and second pressures.

An oil-filled differential pressure transducer comprising:

a housing including a first end containing a first recess, an oppositely disposed second end containing a second recess, and first and second isolation diaphragms respectively enclosing said first and second recesses and forming in conjunction therewith first and second oil-filled cavities;
first and second headers secured within said housing and being electrically coupled together, said first header including a plurality of pins and a central aperture opening there through;
and,
a dielectrically isolated, lead-less sensor mounted to said first header, said sensor including:
a sculptured silicon wafer including first and second surfaces and a deflectable diaphragm;
a P+ region formed on said first surface of said silicon wafer and including a plurality of serpentine resistors formed into a Wheatstone Bridge on the deflectable diaphragm, a group of large contact areas leading from the Wheatstone Bridge, and a rim surrounding and electrically isolated from the contact areas;
and,
a first glass wafer sealed to at least part of said P+ region, said first glass wafer including a central channel and a plurality of apertures opening there through, each of said apertures being filled with a glass-metal frit adapted to make electrical contact to an associated one of said contact areas and a corresponding one of said pins of said first header;
whereby, a first pressure applied to said first diaphragm is communicated to said sensor through said first oil-filled cavity, central aperture of said first header and central channel of said first glass wafer, and a second pressure applied to said second diaphragm is communicated to said sensor through said second oil-filled cavity, such that said first and second pressures are applied to opposite sides of the sensor, and a resulting deflection of said diaphragm is indicative of a difference between said first and second pressures.

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Abstract

Claims17