Reliable, modular, production quality narrow-band high rep rate ArF excimer laser

A very narrow band reliable modular production quality high repetition rate excimer laser for producing a narrow band pulsed laser beam at a repetition rate of at least about 1 Khz, said laser comprising:

• A. a quickly replaceable laser chamber module comprising:
• 1) two elongated electrodes
• 2) a laser gas comprised of a noble gas, fluorine and a buffer gas,
• 3) a gas circulator system for circulating said laser gas between said electrodes at least two cm/millisecond comprising:
• a) a braze-free blade structure defining a shaft,
• b) a brushless motor for rotating said shaft,
• c) magnetic bearings for supporting said shaft said motor and said bearings having rotors attached to said shaft and sealed within an environment exposed to said laser gas and said motor and said bearings having a stator outside of said laser gas environment,
• B. a pulse power system substantially contained within at least one quickly replaceable module and comprising:
• 1) a processor controlled high voltage power supply for periodically, at rates of at least about 1000 Hz, charging with electrical energy a charging capacitor to a predetermined pulse control voltage,
• 2) a compression and amplification circuit for connecting electrical energy stored on said charging capacitor into a high voltage electrical pulses of at least 14,000 volts across said electrodes, and
• C. a quickly replaceable line narrowing module for controlling wavelength of said laser beam to less than 0.6 FWHM.