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AssigneeLSI Logic Corporation
InventorsDerryl D. J. Allman, Verne C. Hornbeck
Estimating the term…
An optical waveguide extends vertically within the interior of an IC-like structure to route optical signals between horizontal waveguides in different layers of horizontal optical interconnects. A light reflecting structure is positioned at the intersection of the horizontal and vertical waveguides to reflect the light. Multiple horizontal waveguides may join the vertical waveguide at a common intersection, to form a beam splitter or a beam combiner. Optical signals from one horizontal waveguide are diverted within the IC-like structure into another horizontal or vertical waveguide. The waveguide is formed with a light reflective structure at an intersection of the horizontal and vertical waveguides, and the waveguide is completed using damascene fabrication techniques.
An optical waveguide in an IC-like structure, comprising a horizontal optical waveguide and a vertical optical waveguide extending vertically from an intersection with the horizontal waveguide within an interior of the IC-like structure, and a light reflecting structure positioned at an intersection of the horizontal waveguide and the vertical waveguide to reflect light between the horizontal and vertical waveguides.
An optical waveguide in an IC-like structure, comprising a plurality of horizontal optical waveguides which are vertically separated from one another within an interior of the IC-like structure, a vertical optical waveguide extending vertically between and intersecting with at least two vertically separated horizontal waveguides within the interior of the IC-like structure, and a light reflecting structure positioned at an intersection of the horizontal and vertical waveguides to reflect light between the horizontal and vertical waveguides.
Dependencies are inferred from the claim text.