Fluorescent x-ray analyzer including detection signal correction based on position variation
AssigneeShimadzu Corporation
InventorShoji Kuwabara
Life of this patent
Estimating the term…
Abstract
A fluorescent x-ray analyzer has a sample table with a movable part such as a turret which can be moved such that a sample which is placed at a specified sample position thereon can be moved to a specified position for analysis, an x-ray source for emitting primary x-rays, a detector for detecting secondary x-rays emitted from the irradiated sample, and a correcting device for correcting the detection signal outputted from the detector for an error caused by the variation in the sample position, or the variations in the distance between the plane of measurement and the x-ray source and/or the detector.
Claims12
A fluorescent x-ray analyzer comprising:
- a sample table having a sample disposed at a sample position on said table;
- an x-ray source for emitting primary x-rays to a target measurement plane of said sample;
- a detector for detecting secondary x-rays emitted from said target measurement plane of said sample when irradiated by said primary x-rays;
- and
- correcting means for correcting an error in a detection signal outputted from said detector according to said sample position, said error being due to a variation in the position of said sample position with respect to said x-ray source and to said detector.
A fluorescent x-ray analyzer comprising:
- a sample table having a movable part which can be moved to different table positions;
- positioning means for moving said movable part of said sample table such that a sample placed at a sample position on said movable part of said sample table is at a specified measurement position;
- an x-ray source for emitting primary x-rays to a target measurement plane of said sample;
- a detector for detecting secondary x-rays emitted from said target measurement plane of said sample when irradiated by said primary x-rays;
- and
- correcting means for correcting an error in a detection signal outputted from said detector according to a variation in said sample position, said error being due to a variation in of said sample position with respect to said x-ray source and to said detector.
Dependencies are inferred from the claim text.