CW far-UV laser system with two active resonators
AssigneeCoherent, Inc.
InventorsLuis A. Spinelli, Briggs Atherton
Life of this patent
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AssigneeCoherent, Inc.
InventorsLuis A. Spinelli, Briggs Atherton
Estimating the term…
A laser system includes a travelling-wave active laser-resonator arranged for generating laser-radiation having a first wavelength and arranged such that the first-wavelength radiation circulates in only one direction therein. An optically-nonlinear element is positioned in the travelling-wave laser-resonator such that the first-wavelength radiation circulates therethrough. Radiation having a second-wavelength is injected into the optically-nonlinear crystal such that the first-wavelength radiation and second-wavelength radiation mix therein, thereby generating radiation having the sum-frequency of the first and second-wavelength radiations. The sum-frequency radiation from the optically-nonlinear element is delivered from the laser system as output-radiation. In one example, the travelling-wave resonator has a YVO4 gain medium generating radiation having a wavelength of about 1064 nm. The optically-nonlinear crystal is a CLBO crystal. 244 nm radiation from an intracavity frequency doubled argon laser is injected into the optically-nonlinear crystal providing output radiation having a wavelength of about 195 nm.
A laser system, comprising:
A laser system, comprising:
A method of generating radiation in a wavelength range between about 175 and 215 nm, comprising the steps of:
A laser system comprising:
Dependencies are inferred from the claim text.