X-ray semiconductor detector

An X-ray semiconductor detector having a pixel array structure in which a plurality of pixel elements are arrayed in a matrix, each pixel element comprising:

• a substrate;
• a signal read transistor formed on said substrate;
• a protective diode formed on said substrate to prevent dielectric breakdown of said signal read transistor;
• a pixel electrode formed above said protective diode to cover said protective diode, signal charges being read from said pixel electrode via said signal read transistor;
• a charge generation film formed on said pixel electrode to generate charges in accordance with an incident X-ray, said charge generation film being in direct contact with an entire surface of said pixel electrode;
• a storage capacitor line formed on said charge generation film to storage said signal charges generated in said charge generation film together with said pixel electrode;
• and
• an insulating film formed between said pixel electrode and said protective diode.

A medical X-ray diagnostic apparatus having an X-ray semiconductor detector, said X-ray semiconductor detector having a pixel array structure in which a plurality of pixel elements are arrayed in a matrix, each pixel element comprising:

• a charge generation film for generating charges in accordance with an incident X-ray;
• a pixel electrode of a storage capacitor for storing said signal charges generated in said charge generation film, an entire surface of said pixel electrode being in direct contact with said charge generation film;
• a signal read transistor for reading said signal charges from said storage capacitor;
• a protective diode arranged below a pixel electrode of said storage capacitor, said protective diode being arranged to remove excessive charges from said storage capacitor and prevent dielectric breakdown of said signal read transistor;
• and
• an insulating film formed between said pixel electrode and said protective diode.